Plastic Properties of SiCN/Si during Nanoindentation

doi:10.14103/j.issn.2095-8412.2017.02.005

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Industrial Technology Innovation ›› 2017, Vol. 4 ›› Issue (2) : 19-22. DOI: 10.14103/j.issn.2095-8412.2017.02.005

Plastic Properties of SiCN/Si during Nanoindentation

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{{article.zuoZheEn_L}}. {{article.title_en}}. {{journal.qiKanMingCheng_EN}}. 2017, 4(2): 19-22 https://doi.org/10.14103/j.issn.2095-8412.2017.02.005

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Published
2017-04-25
Issue Date
2017-05-05