Static Characteristic Analysis of Vacuum Preloaded Orifice Throttling Aerostatic Floating Bearing

CHEN Zuobing, HONG Junhui, MEI Wenhui, WU Zhihao, TONG Chengguang

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Industrial Technology Innovation ›› 2022, Vol. 9 ›› Issue (3) : 51-57. DOI: 10.14103/j.issn.2095-8412.2022.06.008

Static Characteristic Analysis of Vacuum Preloaded Orifice Throttling Aerostatic Floating Bearing

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